The promise of better performance, lower cost, and miniaturization of sensor and actuator systems has motivated growth in the area of MicroElectroMechanical Systems (MEMS): silicon-based integrated microsystems. MEMS technology has broad applications such as inertial navigation, data storage, biochemical analysis, micromanipulation, optical displays, and microfluidic jet systems. This course is an introduction to MEMS, intended for first and second-year graduate students in ECE and Robotics who desire the engineering background necessary for research in MEMS at Carnegie Mellon.
