Several groups use the high resolution Philips diffraction system to characterize electronic materials.
This system has a four bounce Ge monochromator and an optional three bounce Ge analyser. Materials studied include a variety of semiconductor films grown on well studied substrates. By studying the diffraction from films and their substrates, a characterization of relative lattice orientation, strain, film thickness, and film roughness is obtained. Reciprocal space maps can be generated under computer control; these maps are used to characterize diffuse scattering around Bragg peak positions and, thus, to determine the density and character of defects in films.