M-919

10/01/01, entire wafer to Ashutosh for x-ray work; it broke in half at some point during mounting/dismounting from the x-ray setup

1/24/02
Ashutosh cut 1cm x 1 cm piece for study. Did H-etching at 1750 C, 90 s H-etching; images (use high 30 kV accelerating voltage (usual is 10 kV), so they show the underlying porous network):

3/15/02
Plan-view and xsectional SEM images on unetched sample:

5/21/02
piece to Ashutosh for SEM study

7/29/02
Plan-view SEM images on 2 min RIE sample:


Plan-view SEM images on 4 min RIE sample:
Plan-view SEM images on 6 min RIE sample: