piece map

8/9/01
piece C2 to Look
piece C3 to Kuan

• TEM image 1
• TEM image 2

• TEM image 3
• TEM image 4

1/11/02
piece B3 to Ashutosh for SEM (to compare with earlier TEM); images:

• SEM image 1
• SEM image 2
• SEM image 3

1/14/02
piece B3 to Ashutosh for RIE & SEM; SEM images after 6 min RIE (porous layer thickness about 1.9 micron before etch and 1.5 micron after etch, giving etch rate of about 67 nm/min or 1.1 nm/s):

• SEM image 1
• SEM image 2
• SEM image 3
• SEM image 4
• SEM image 5
• SEM image 6
• SEM image 7
• SEM image 8
• SEM image 9
• SEM image 10
• SEM image 11

4/29/02
piece E3 to Ashutosh for RIE & SEM