M-818

9/6/01
entire wafer to Choyke for analysis (he will use 1/4, and save remaining 3/4 for future needs of other users)

10/23/01
Plan-view SEM images from Ashutosh of surface pores
Pores are about 30 nm in diameter; their areal density is about 28 per micron-2

5/23/02
piece returned from Choyke; given to Ashutosh for RIE & SEM

6/20/02
XSEM images from Ashutosh