piece map

5/30/02
piece D3 to Look

5/30/02
piece D4 to Ashutosh

9/24/02
piece E1 to Ashutosh

10/01/02
pieces B4, E4 to Ashutosh for H-etching and RIE

10/16/02
pieces C2, C3 to Ashutosh for H-etching and RIE